Invention Application
US20160099340A1 HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME 有权
高电压金属氧化物半导体晶体管器件及其形成方法

  • Patent Title: HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME
  • Patent Title (中): 高电压金属氧化物半导体晶体管器件及其形成方法
  • Application No.: US14506700
    Application Date: 2014-10-06
  • Publication No.: US20160099340A1
    Publication Date: 2016-04-07
  • Inventor: Ming-Shun Hsu
  • Applicant: UNITED MICROELECTRONICS CORP.
  • Main IPC: H01L29/66
  • IPC: H01L29/66 H01L29/423 H01L29/78
HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME
Abstract:
A HVMOS transistor device is provided. The HVMOS has a substrate, a gate structure, a drain region and a source region, a base region and a gate dielectric layer. The substrate has a first insulating structure disposed therein. The gate structure is disposed on the substrate and comprises a first portion covering a portion of the first insulating structure. The drain region and the source region are disposed in the substrate at two respective sides of the gate, and comprise a first conductivity type. The base region encompasses the source region, wherein the base region comprises a second conductivity type complementary to the first conductivity type. The gate dielectric layer is between the gate and the drain region, the base region and the substrate. The gate structure further comprises a second portion penetrating into the base region. A method of forming the HVMOS is further provided.
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