发明申请
- 专利标题: Magnetoresistive Sensor Module and Method for Manufacturing the Same
- 专利标题(中): 磁阻传感器模块及其制造方法
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申请号: US14972648申请日: 2015-12-17
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公开(公告)号: US20160109536A1公开(公告)日: 2016-04-21
- 发明人: Stefan Kolb , Klemens Pruegl , Juergen Zimmer
- 申请人: Infineon Technologies AG
- 优先权: DE102005008368.4 20050223; DE102005047414.4 20051004
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; H01L43/12 ; G01R33/07
摘要:
In the method of manufacturing a magnetoresistive sensor module, at first a composite arrangement out of a semiconductor substrate and a metal-insulator arrangement is provided, wherein a semiconductor circuit arrangement is integrated adjacent to a main surface of the semiconductor substrate into the same, wherein the metal-insulator arrangement is arranged on the main surface of the semiconductor substrate and comprises a structured metal sheet and insulation material at least partially surrounding the structured metal sheet, wherein the structured metal sheet is electrically connected to the semiconductor circuit arrangement. Then, a magnetoresistive sensor structure is applied onto a surface of the insulation material of the composite arrangement, and finally an electrical connection between the magnetoresistive sensor structure and the structured metal sheet is established, so that the magnetoresistive sensor structure is connected to the integrated circuit arrangement.
公开/授权文献
- US09423472B2 Magnetoresistive sensor module on the planar surface 公开/授权日:2016-08-23
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