Invention Application
- Patent Title: DUMMY METAL STRUCTURE AND METHOD OF FORMING DUMMY METAL STRUCTURE
- Patent Title (中): 金属结构和形成金属结构的方法
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Application No.: US14515836Application Date: 2014-10-16
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Publication No.: US20160111360A1Publication Date: 2016-04-21
- Inventor: Jae Kyu CHO , Shan GAO
- Applicant: GLOBALFOUNDRIES Inc.
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/768 ; H01L23/522

Abstract:
Methods for forming a dummy metal structure between dies on a semiconductor wafer and the resulting devices are disclosed. Embodiments may include forming metal interconnection layers extending from a substrate of a semiconductor wafer to a top metal interconnection layer of the semiconductor wafer between a plurality of die regions, each of the metal interconnection layers including a plurality of dummy vertical interconnect accesses (VIAs) and a plurality of dummy metal lines, with the plurality of dummy metal lines laterally connecting the plurality of dummy VIAs within each respective metal interconnection layer, and a plurality of dummy VIAs within a first metal interconnection layer vertically connecting a plurality of dummy metal lines within the first metal interconnection layer to a plurality of dummy metal lines within a second metal interconnection layer, and the second metal interconnection layer being below the first metal interconnection layer.
Public/Granted literature
- US09406608B2 Dummy metal structure and method of forming dummy metal structure Public/Granted day:2016-08-02
Information query
IPC分类: