Invention Application
US20160111389A1 BONDING WIRE FOR SEMICONDUCTOR DEVICE USE AND METHOD OF PRODUCTION OF SAME
有权
用于半导体器件使用的接合线及其制造方法
- Patent Title: BONDING WIRE FOR SEMICONDUCTOR DEVICE USE AND METHOD OF PRODUCTION OF SAME
- Patent Title (中): 用于半导体器件使用的接合线及其制造方法
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Application No.: US14893833Application Date: 2015-03-31
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Publication No.: US20160111389A1Publication Date: 2016-04-21
- Inventor: Takashi YAMADA , Daizo ODA , Ryo OISHI , Teruo HAIBARA , Tomohiro UNO
- Applicant: NIPPON MICROMETAL CORPORATION , NIPPON STEEL & SUMIKIN MATERIALS CO. LTD.
- Priority: JP2014-072650 20140331
- International Application: PCT/JP2015/060035 WO 20150331
- Main IPC: H01L23/00
- IPC: H01L23/00 ; C22C5/06 ; C22F1/14 ; C22C5/08

Abstract:
Bonding wire for semiconductor device use where both leaning failures and spring failures are suppressed by (1) in a cross-section containing the wire center and parallel to the wire longitudinal direction (wire center cross-section), there are no crystal grains with a ratio a/b of a long axis “a” and a short axis “b” of 10 or more and with an area of 15 μm2 or more (“fiber texture”), (2) when measuring a crystal direction in the wire longitudinal direction in the wire center cross-section, the ratio of crystal direction with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 50% to 90%, and (3) when measuring a crystal direction in the wire longitudinal direction at the wire surface, the ratio of crystal direction with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 50% to 90%. During the drawing step, a drawing operation with a rate of reduction of area of 15.5% or more is performed at least once. The final heat treatment temperature and the pre-final heat treatment temperature are made predetermined ranges.
Public/Granted literature
- US09536854B2 Bonding wire for semiconductor device use and method of production of same Public/Granted day:2017-01-03
Information query
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