Invention Application
- Patent Title: APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
- Patent Title (中): 用于制造显示装置的装置和方法
-
Application No.: US14676959Application Date: 2015-04-02
-
Publication No.: US20160111680A1Publication Date: 2016-04-21
- Inventor: Yunah CHUNG , Eungseok PARK , Wonmin YUN , Byoungduk LEE , Yoonhyeung CHO , Yongchan JU
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Priority: KR10-2014-0141697 20141020
- Main IPC: H01L51/52
- IPC: H01L51/52 ; C23C16/455 ; C23C16/04 ; H01L51/56 ; H01L27/32

Abstract:
An apparatus for manufacturing a display apparatus includes a stage supporting a substrate, a deposition gas supplying unit above the substrate, the deposition gas supplying unit spraying a deposition gas onto the substrate, and a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes.
Public/Granted literature
- US09803279B2 Apparatus and method for manufacturing display apparatus Public/Granted day:2017-10-31
Information query
IPC分类: