Invention Application
US20160118216A1 METHOD FOR MEASURING A DISTANCE OF A COMPONENT FROM AN OBJECT AND FOR SETTING A POSITION OF A COMPONENT IN A PARTICLE BEAM DEVICE 有权
用于测量来自物体的部件的距离和用于设置粒子束装置中的部件的位置的方法

  • Patent Title: METHOD FOR MEASURING A DISTANCE OF A COMPONENT FROM AN OBJECT AND FOR SETTING A POSITION OF A COMPONENT IN A PARTICLE BEAM DEVICE
  • Patent Title (中): 用于测量来自物体的部件的距离和用于设置粒子束装置中的部件的位置的方法
  • Application No.: US14874969
    Application Date: 2015-10-05
  • Publication No.: US20160118216A1
    Publication Date: 2016-04-28
  • Inventor: Holger DoemerAndreas Schmaunz
  • Applicant: Carl Zeiss Microscopy GmbH
  • Priority: DE102014220122.5 20141003
  • Main IPC: H01J37/02
  • IPC: H01J37/02 H01J37/28
METHOD FOR MEASURING A DISTANCE OF A COMPONENT FROM AN OBJECT AND FOR SETTING A POSITION OF A COMPONENT IN A PARTICLE BEAM DEVICE
Abstract:
The system described herein determines a distance of a component of a particle beam device from an object to the particle beam device and sets a position of the component in the particle beam device. The component is moved from a first starting position of the component relatively in the direction of an object, which is located in a second starting position, until the component makes contact with the object. When the component makes contact with the object, an adjusting path covered by the component and/or the object during the movement is determined. The adjusting path runs along a straight line that joins a first point on the component in the first starting position to a second point on the object in the second starting position that is arranged closest to the first point on the component along this line. The adjusting path corresponds to the distance.
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