Invention Application
- Patent Title: Low-Resistance Interconnects and Methods of Making Same
- Patent Title (中): 低电阻互连及其制作方法
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Application No.: US14941288Application Date: 2015-11-13
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Publication No.: US20160118340A1Publication Date: 2016-04-28
- Inventor: Jaydeb Goswami , Allen McTeer
- Applicant: Micron Technology, Inc.
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L23/535

Abstract:
Devices and methods for providing low-resistance interconnects in a semiconductor device are provided. Specifically, one or more embodiments of the present invention relate to disposing a conductive material in a trench without disposing a resistive barrier material between the conductive material and the sidewalls of the trench so that the conductive material takes up the full width of the trench. For example, the trench may be disposed over one or more contacts made of a barrier material such as titanium nitride that also acts as a seed, and the conductive material may be grown on top of the titanium nitride to fill the trench.
Information query
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