Invention Application
US20160124299A1 TRANSMISSION BALANCING FOR PHASE SHIFT MASK WITH A TRIM MASK
有权
传输平衡与相机转换面具与TRIM MASK
- Patent Title: TRANSMISSION BALANCING FOR PHASE SHIFT MASK WITH A TRIM MASK
- Patent Title (中): 传输平衡与相机转换面具与TRIM MASK
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Application No.: US14528174Application Date: 2014-10-30
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Publication No.: US20160124299A1Publication Date: 2016-05-05
- Inventor: Dan Yu , Aaron Bowser , Yi Liu
- Applicant: SEAGATE TECHNOLOGY LLC
- Main IPC: G03F1/30
- IPC: G03F1/30 ; G03F7/20
Abstract:
Implementations described and claimed herein include photolithography technology to alleviate the imbalance of transmission intensity induced. In one implementation, a method comprises exposing an alternating phase shift mask (Alt-PSM) and a trim mask, wherein an exposure placement of the trim mask is shifted relative to an exposure placement of the Alt-PSM.
Public/Granted literature
- US09341939B1 Transmission balancing for phase shift mask with a trim mask Public/Granted day:2016-05-17
Information query
