Invention Application
US20160124300A1 Cut-Mask Patterning Process for FIN-Like Field Effect Transistor (FINFET) Device 有权
FIN型场效应晶体管(FINFET)器件的切割掩模图案化处理

Cut-Mask Patterning Process for FIN-Like Field Effect Transistor (FINFET) Device
Abstract:
Disclosed is a mask for use in a lithography system having a defined resolution. The mask comprises first and second patterns that are greater than the defined resolution and a sub-resolution feature that is less than the defined resolution. Portions of the first and second patterns are positioned close to each other and separated by the sub-resolution feature in an intersection area. The size and shape of the sub-resolution feature are such that when the mask is used in the lithography system, a resulting pattern includes the first and second patterns interconnected with each other through the interconnection area.
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