Invention Application
US20160124300A1 Cut-Mask Patterning Process for FIN-Like Field Effect Transistor (FINFET) Device
有权
FIN型场效应晶体管(FINFET)器件的切割掩模图案化处理
- Patent Title: Cut-Mask Patterning Process for FIN-Like Field Effect Transistor (FINFET) Device
- Patent Title (中): FIN型场效应晶体管(FINFET)器件的切割掩模图案化处理
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Application No.: US14991233Application Date: 2016-01-08
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Publication No.: US20160124300A1Publication Date: 2016-05-05
- Inventor: Wei-De Ho , Ching-Yu Chang , Kuei-Liang Lu , Ming-Feng Shieh
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Main IPC: G03F1/38
- IPC: G03F1/38

Abstract:
Disclosed is a mask for use in a lithography system having a defined resolution. The mask comprises first and second patterns that are greater than the defined resolution and a sub-resolution feature that is less than the defined resolution. Portions of the first and second patterns are positioned close to each other and separated by the sub-resolution feature in an intersection area. The size and shape of the sub-resolution feature are such that when the mask is used in the lithography system, a resulting pattern includes the first and second patterns interconnected with each other through the interconnection area.
Public/Granted literature
- US09904163B2 Cut-mask patterning process for FIN-like field effect transistor (FINFET) device Public/Granted day:2018-02-27
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