Invention Application
US20160131528A1 INTERFEROMETER, SPECTROPHOTOMETER USING INTERFEROMETER AND CONTROL METHOD FOR INTERFEROMETER
有权
干涉仪,使用干涉仪的分光光度计和干涉仪的控制方法
- Patent Title: INTERFEROMETER, SPECTROPHOTOMETER USING INTERFEROMETER AND CONTROL METHOD FOR INTERFEROMETER
- Patent Title (中): 干涉仪,使用干涉仪的分光光度计和干涉仪的控制方法
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Application No.: US14933867Application Date: 2015-11-05
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Publication No.: US20160131528A1Publication Date: 2016-05-12
- Inventor: Yoshitake ANDO
- Applicant: HORIBA, Ltd.
- Priority: JP2014-227166 20141107
- Main IPC: G01J3/453
- IPC: G01J3/453 ; G01B9/02

Abstract:
The present invention provides an interferometer and the like, that is capable of ensuring the speed stability of the movable mirror while achieving the speed up of the reciprocal movement of the moving mirror and suppressing the increment of the maximum instantaneous thrust force required for the turning back as much as possible. The interferometer includes a moving mirror, a movement mechanism for reciprocating the moving mirror, a movement control part for controlling the movement mechanism and allowing the moving mirror to be reciprocated at a constant speed, and a measurement part for measuring a position of the moving mirror. The movement control part is adapted to receive target position data indicating a target position of the moving mirror, and control the movement mechanism to bring the measurement position of the moving mirror measured by the measurement part close to the target position indicated by the target position data.
Public/Granted literature
- US09945723B2 Interferometer, spectrophotometer using interferometer and control method for interferometer Public/Granted day:2018-04-17
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