Invention Application
US20160135276A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权
极光紫外线发光装置和超极紫外线发光系统

  • Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
  • Patent Title (中): 极光紫外线发光装置和超极紫外线发光系统
  • Application No.: US14995636
    Application Date: 2016-01-14
  • Publication No.: US20160135276A1
    Publication Date: 2016-05-12
  • Inventor: Tamotsu ABEOsamu WAKABAYASHI
  • Applicant: Gigaphoton Inc.
  • Applicant Address: JP Tochigi
  • Assignee: Gigaphoton Inc.
  • Current Assignee: Gigaphoton Inc.
  • Current Assignee Address: JP Tochigi
  • Main IPC: H05G2/00
  • IPC: H05G2/00
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber; a target generation unit configured to output a target to a predetermined region inside the chamber; a focusing optical system configured to concentrate a pulse laser beam to the predetermined region; and a plurality of scattered light detectors each configured to detect scattered light from the target irradiated with the pulse laser beam. The extreme ultraviolet light generation apparatus may further include: an optical path changer configured to change an optical path of the pulse laser beam; and an optical path controller configured to control the optical path changer on a basis of results of detection by the plurality of scattered light detectors.
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