Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US15009473Application Date: 2016-01-28
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Publication No.: US20160148897A1Publication Date: 2016-05-26
- Inventor: Kentaro Saito
- Applicant: Renesas Electronics Corporation
- Priority: JP2014-045679 20140307
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/10

Abstract:
A semiconductor device includes a corner constituted by a first side and a second side being perpendicular to the first side; and a plurality of pads including a first pad, arranged along the second side and formed over a semiconductor substrate. The first pad is arranged nearer the corner than other pads of the plurality of pads. The first pad includes a third side, a fourth side being perpendicular to the third side, a fifth side being parallel to the third side and a sixth side being perpendicular to a fifth side. The third side and the fourth side are nearer to the corner than the fifth side and sixth side. A first dummy wiring is formed along the first side. A second dummy wiring is formed along the second side. The first dummy wiring and the second dummy wiring are formed integrally with each other.
Public/Granted literature
- US09607962B2 Semiconductor device and manufacturing method thereof Public/Granted day:2017-03-28
Information query
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