Invention Application
- Patent Title: RESIN DISPENSER FOR NANO-IMPRINT
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Application No.: US15010474Application Date: 2016-01-29
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Publication No.: US20160152022A1Publication Date: 2016-06-02
- Inventor: Bong-su SHIN , Dong-ouk KIM , Joon-young PARK , Sung-hoon LEE , Jae-seung CHUNG , Suk-gyu HAHM , Dae-young LEE , Gug-rae JO
- Applicant: Samsung Electronics Co., Ltd. , Samsung Display Co., LTD.
- Priority: KR10-2013-0126112 20131022
- Main IPC: B41F31/02
- IPC: B41F31/02

Abstract:
A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber.
Information query