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发明申请
US20160158807A1 DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES 审中-公开
从高层结构中去除

  • 专利标题： DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES
  • 专利标题（中）： 从高层结构中去除
  • 申请号： US15011411
    申请日： 2016-01-29
  • 公开(公告)号： US20160158807A1
    公开(公告)日： 2016-06-09
  • 发明人: TOD ROBINSON
  • 申请人： RAVE, LLC
  • 主分类号： B08B1/00
  • IPC分类号： B08B1/00
DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES
摘要：
A system for removing debris from a surface of a substrate, the system including a cantilever arm and a tip supported by the cantilever arm. The tip has a proximal portion and a distal portion such that the tip is supported by the cantilever arm via the proximal portion. The system further includes at least one nanofibril attached to the distal portion of the tip, and the at least one nanofibril is configured to elastically deform against or around the debris or the surface of the substrate.
摘要（中）：

一种用于从基板的表面去除碎屑的系统，该系统包括悬臂和由悬臂支撑的尖端。 尖端具有近端部分和远端部分，使得尖端经由近端部分由悬臂臂支撑。 该系统还包括至少一个附着到尖端的远端部分的纳米纤维，并且所述至少一个纳米纤维构造成抵抗或围绕所述碎片或所述基底表面弹性变形。

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