发明申请
- 专利标题: THROUGH-HOLE FORMING METHOD, THROUGH-HOLE FORMING APPARATUS, AND METHOD OF MANUFACTURING GLASS SUBSTRATE PROVIDED WITH THROUGH-HOLE
- 专利标题(中): 通孔形成方法,通孔形成装置以及制造具有孔的玻璃基底的方法
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申请号: US14965111申请日: 2015-12-10
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公开(公告)号: US20160168006A1公开(公告)日: 2016-06-16
- 发明人: Motoshi ONO
- 申请人: Asahi Glass Company, Limited
- 申请人地址: JP Chiyoda-ku
- 专利权人: Asahi Glass Company, Limited
- 当前专利权人: Asahi Glass Company, Limited
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2014-254424 20141216
- 主分类号: C03B33/10
- IPC分类号: C03B33/10 ; B23K9/013 ; C03C23/00
摘要:
Disclosed is a through-hole forming method including a process of forming, by condensing and irradiating a laser beam onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate. A medium between the lens and the insulation substrate is air. A converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2): (d/2)/f=tan θ . . . (1), and 0.16≦sin θ≦0.22 . . . (2).
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