发明申请
- 专利标题： THIN FILM TRANSISTOR ARRAY PANEL AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 薄膜晶体管阵列及其制造方法
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申请号： US14879993申请日： 2015-10-09
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公开(公告)号： US20160197197A1公开(公告)日： 2016-07-07
- 发明人: Jung Yun JO , Ki Seong SEO , Eun Jeong CHO
- 申请人： SAMSUNG DISPLAY CO., LTD.
- 优先权： KR10-2015-0000225 20150102
- 主分类号： H01L29/786
- IPC分类号： H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L29/66
摘要：
A thin film transistor array panel according to an exemplary embodiment of the present invention includes: an insulating substrate; a polycrystal semiconductor layer formed on the insulating substrate; a buffer layer formed below the polycrystal semiconductor layer and containing fluorine; a gate electrode overlapping the polycrystal semiconductor layer; a source electrode and a drain electrode overlapping the polycrystal semiconductor layer and separated from each other; and a pixel electrode electrically connected to the drain electrode.
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