Invention Application
US20160201213A1 PLATING DEVICE 审中-公开
电镀设备

PLATING DEVICE
Abstract:
A plating device equipped with a plating tank and an impurity removal mechanism disposed so as to remove impurities from a plating solution in the plating tank or a plating solution to be supplied to the plating tank, in which the impurity removal mechanism includes at least one of a carboxylic acid removal mechanism and an alcohol removal mechanism.
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