Invention Application
US20160202119A1 SPECTROMETER CHIP FOR ANALYZING FLUID SAMPLE AND METHOD OF MANUFACTURING THE SAME 审中-公开
用于分析流体样品的光谱仪芯片及其制造方法

SPECTROMETER CHIP FOR ANALYZING FLUID SAMPLE AND METHOD OF MANUFACTURING THE SAME
Abstract:
A spectrometer chip for analyzing a fluid sample and a method of manufacturing the spectrometer chip are provided. The spectrometer chip includes a cell comprising a chamber in which the fluid sample is accommodated, and a spectrometer comprising a channel of silicon nitride, the channel being configured to resonate and transmit light that is emitted from the fluid sample, and the spectrometer being disposed on a surface of the cell. The spectrometer chip further includes a detector configured to detect the transmitted light.
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