Invention Application
US20160202119A1 SPECTROMETER CHIP FOR ANALYZING FLUID SAMPLE AND METHOD OF MANUFACTURING THE SAME
审中-公开
用于分析流体样品的光谱仪芯片及其制造方法
- Patent Title: SPECTROMETER CHIP FOR ANALYZING FLUID SAMPLE AND METHOD OF MANUFACTURING THE SAME
- Patent Title (中): 用于分析流体样品的光谱仪芯片及其制造方法
-
Application No.: US14929554Application Date: 2015-11-02
-
Publication No.: US20160202119A1Publication Date: 2016-07-14
- Inventor: Juneyoung LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2015-0006119 20150113
- Main IPC: G01J3/02
- IPC: G01J3/02 ; H01L31/0352 ; H01L31/18 ; G01J3/42 ; G01J3/44

Abstract:
A spectrometer chip for analyzing a fluid sample and a method of manufacturing the spectrometer chip are provided. The spectrometer chip includes a cell comprising a chamber in which the fluid sample is accommodated, and a spectrometer comprising a channel of silicon nitride, the channel being configured to resonate and transmit light that is emitted from the fluid sample, and the spectrometer being disposed on a surface of the cell. The spectrometer chip further includes a detector configured to detect the transmitted light.
Information query