Invention Application
- Patent Title: ELECTRO-ABSORPTION OPTICAL MODULATION DEVICE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 电吸收光学调制装置及其制造方法
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Application No.: US14848077Application Date: 2015-09-08
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Publication No.: US20160202504A1Publication Date: 2016-07-14
- Inventor: In Gyoo KIM , Gyungock KIM , Sang Hoon KIM
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Priority: KR10-2015-0006866 20150114
- Main IPC: G02F1/025
- IPC: G02F1/025

Abstract:
Provided is an optical modulator including an optical waveguide and an optical modulation part integrated on the optical waveguide that is clad in oxide silicon and has silicon as core by using a bulk silicon wafer in place of an silicon-on-insulator (SOI) used for a typical optical waveguide and optical modulator and using complementary metal oxide semiconductor (CMOS) and thermal oxide film formation processes, and a fabrication method thereof
Public/Granted literature
- US09618776B2 Electro-absorption optical modulation device and method of fabricating the same Public/Granted day:2017-04-11
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