A touch device including a substrate and a sensing electrode thereon is provided. An insulation layer is disposed on the sensing electrode, wherein the insulation layer includes a first contact via exposing a part of a terminal of the sensing electrode. A trace is disposed on the insulation layer and electrically connected to the terminal of the sensing electrode through the first contact via. A corner in the first contact via includes a first edge, a second edge, and a third edge, wherein the second edge is disposed between the first edge and the third edge. The first edge and the second edge include a first angle therebetween of greater than 90 degrees, and the second edge and the third edge include a second angle therebetween of greater than 90 degrees.