Invention Application
US20160203917A1 Method of Operating an Integrated Switchable Capacitive Device 有权
操作集成可切换电容器件的方法

Method of Operating an Integrated Switchable Capacitive Device
Abstract:
A variable capacitor includes a fixed main capacitor electrode disposed in a first metal layer overlying a substrate, a second main capacitor electrode spaced from the fixed main capacitor electrode, and a movable capacitor electrode disposed in the first metal layer adjacent the fixed main capacitor electrode. The movable capacitor electrode can be caused to be in a first position ohmically electrically connected to the fixed main capacitor electrode such that the variable capacitor has a first capacitance value or in a second position spaced from the fixed main capacitor electrode such that the variable capacitor has a second capacitance value.
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