发明申请
US20160204716A1 Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device 审中-公开
执行器,快门装置,流体控制装置,开关和二维扫描传感器装置

Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device
摘要:
An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.
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