发明申请
US20160204716A1 Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device
审中-公开
执行器,快门装置,流体控制装置,开关和二维扫描传感器装置
- 专利标题: Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device
- 专利标题(中): 执行器,快门装置,流体控制装置,开关和二维扫描传感器装置
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申请号: US14910622申请日: 2014-07-30
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公开(公告)号: US20160204716A1公开(公告)日: 2016-07-14
- 发明人: Masato SUZUKI , Akito MORI , Gen HASHIGUCHI , Tatsuhiko SUGIYAMA , Hiroshi IMAMOTO , Masatoshi OBA , Hiroyuki MITSUYA , Hisayuki ASHIZAWA , Kazunori ISHIBASHI
- 申请人: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY , OMRON CORPORATION , KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
- 优先权: JP2013-165166 20130808
- 国际申请: PCT/JP2014/070072 WO 20140730
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; F16K31/02 ; G02B26/02 ; B81B3/00 ; H01H59/00
摘要:
An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.