Invention Application
- Patent Title: ELECTROMAGNETIC WAVE DETECTING ELEMENT
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Application No.: US15138476Application Date: 2016-04-26
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Publication No.: US20160240581A1Publication Date: 2016-08-18
- Inventor: Yoshihiro OKADA
- Applicant: FUJIFILM CORPORATION
- Priority: JP2008-096218 20080402
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The present invention provides an electromagnetic wave detecting element that can suppress occurrence of cracking at a substrate peripheral portion, and occurrence of breakage of lead-out wires. An interlayer insulating film is formed so as to cover TFT switches on a substrate. An interlayer insulating film is formed so as to cover semiconductor layer of sensor portions that generate charges due to electromagnetic waves that are an object of detection being irradiated, and cover a region on the substrate where the interlayer insulating film is formed.
Public/Granted literature
- US09520438B2 Electromagnetic wave detecting element Public/Granted day:2016-12-13
Information query
IPC分类: