Invention Application
US20160254200A1 Method for Detecting a Crack in a Semiconductor Body of a Semiconductor Component 审中-公开
用于检测半导体部件的半导体本体中的裂纹的方法

Method for Detecting a Crack in a Semiconductor Body of a Semiconductor Component
Abstract:
A semiconductor component includes a semiconductor body having a bottom side, a top side spaced distant from the bottom side in a vertical direction, and a thickness in the vertical direction, and a crack sensor configured to detect a crack in the semiconductor body. The crack sensor extends into the semiconductor body. A distance between the crack sensor and the bottom side is less than the thickness of the semiconductor body. A crack in the semiconductor body is detected by specifying a first value of a characteristic variable of the crack sensor, determining a second value of the characteristic variable of the crack sensor at a different time than the first value is specified, and determining the semiconductor body has a crack if the second value differs from the first value by more than a pre-defined difference.
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