Invention Application
US20160254200A1 Method for Detecting a Crack in a Semiconductor Body of a Semiconductor Component
审中-公开
用于检测半导体部件的半导体本体中的裂纹的方法
- Patent Title: Method for Detecting a Crack in a Semiconductor Body of a Semiconductor Component
- Patent Title (中): 用于检测半导体部件的半导体本体中的裂纹的方法
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Application No.: US15149765Application Date: 2016-05-09
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Publication No.: US20160254200A1Publication Date: 2016-09-01
- Inventor: Markus Zundel , Uwe Schmalzbauer , Rudolf Zelsacher
- Applicant: Infineon Technologies AG
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00 ; H01L29/739

Abstract:
A semiconductor component includes a semiconductor body having a bottom side, a top side spaced distant from the bottom side in a vertical direction, and a thickness in the vertical direction, and a crack sensor configured to detect a crack in the semiconductor body. The crack sensor extends into the semiconductor body. A distance between the crack sensor and the bottom side is less than the thickness of the semiconductor body. A crack in the semiconductor body is detected by specifying a first value of a characteristic variable of the crack sensor, determining a second value of the characteristic variable of the crack sensor at a different time than the first value is specified, and determining the semiconductor body has a crack if the second value differs from the first value by more than a pre-defined difference.
Information query
IPC分类: