The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.