The invention relates to a soft-magnetic powder coated with a silicon based coating, wherein the silicon based coating comprises at least one of the following fluorine containing compositions: a) a fluorine containing composition of formula (I) Si1-0,25aM1aO2-0,5bFb  (I) wherein a is in the range of 0.015 to 0.52, b is in the range of 0.015 to 0.52, M1 is H, K, Rb, Cs or NR14, wherein each R1 is independently selected from the group consisting of H, C1-6 alkyl, phenyl and benzyl; or b) a fluorine containing composition of formula (II) Si1-0,75cM2cO2-0,5dFd  (II) wherein c is in the range of 0.005 to 0.17, d is in the range of 0.015 to 0.52, M2 is B or Al; or c) a fluorine containing composition of formula (III) Si1-1,25ePeO2-0,5fFf  (III) wherein e is in the range of 0.003 to 0.10, f is in the range of 0.015 to 0.52. The invention further relates to a process of coating the soft-magnetic powder, the use of such soft-magnetic powder and an electronic component including such soft-magnetic powder.