发明申请
- 专利标题： PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 光电转换装置及其制造方法
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申请号： US15079562申请日： 2016-03-24
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公开(公告)号： US20160293874A1公开(公告)日： 2016-10-06
- 发明人: Haruhi OOOKA , Atsuko llDA , Hideyuki NAKAO , Kenji TODORI , Takeshi GOTANDA
- 申请人： Kabushiki Kaisha Toshiba
- 申请人地址： JP Minato-ku
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Minato-ku
- 优先权： JP2015-068300 20150330
- 主分类号： H01L51/42
- IPC分类号： H01L51/42 ; H01L51/00
摘要：
A method of manufacturing a photoelectric conversion device of an embodiment includes: forming a layer on a substrate; and drying this layer. The layer contains a p-type semiconductor, an n-type semiconductor, and a compound represented by the following formula (1). The layer is dried under pressures of 100 Pa or less and substrate temperatures of 40 to 200° C. R1—(CH2)n—R2 (1) Here, n: 1 to 20, and R1, R2: halogen or SH
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