Invention Application
- Patent Title: INSULATED GATE BIPOLAR TRANSISTOR AND MANUFACTURING METHOD THEREFOR
- Patent Title (中): 绝缘栅双极晶体管及其制造方法
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Application No.: US14902284Application Date: 2014-08-25
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Publication No.: US20160307995A1Publication Date: 2016-10-20
- Inventor: Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
- Applicant: CSMC Technologies Fab1 Co., Ltd.
- Priority: CN201310379443.1 20130827
- International Application: PCT/CN2014/085082 WO 20140825
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/16 ; H01L29/66 ; H01L29/20 ; H01L29/04 ; H01L21/761 ; H01L29/739 ; H01L29/161

Abstract:
An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51). A P-type heavily doped region (71) is disposed in the N-type heavily doped region (61). An inward recessed shallow pit (62) with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (71). By disposing the carrier enhancement region (41), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit (62) can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.
Public/Granted literature
- US09881994B2 Insulated gate bipolar transistor and manufacturing method therefor Public/Granted day:2018-01-30
Information query
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