发明申请
- 专利标题: SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THEREOF
- 专利标题(中): 半导体封装及其制造方法
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申请号: US14689491申请日: 2015-04-17
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公开(公告)号: US20160308100A1公开(公告)日: 2016-10-20
- 发明人: TUNG BAO LU , HENG-SHENG WANG , TZU-HAN HSU
- 申请人: CHIPMOS TECHNOLOGIES INC
- 主分类号: H01L33/62
- IPC分类号: H01L33/62 ; H01L33/48 ; H01L23/00 ; H01L33/40
摘要:
A semiconductor package comprises a semiconductor chip having an active surface with a conductive pad thereon; an electroplated Au—Sn alloy bump over the active surface; and a (glass) substrate comprising conductive traces electrically coupling with the electroplated Au—Sn alloy bump, wherein the electroplated Au—Sn alloy bump has a composition from about Au0.85Sn0.15 to about Au0.75Sn0.25 in weight percent uniformly distributed from an end in proximity to the active surface to an end in proximity to the substrate. A method of manufacturing a semiconductor package comprises forming patterns of conductive pads on an active surface of a semiconductor chip; electroplating Au—Sn alloy bump over the conductive pads; and bonding the semiconductor chip on a corresponding conductive trace on a substrate by a reflow operation or a thermal press operation.
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