Invention Application
- Patent Title: SEMICONDUCTOR DEVICE INCLUDING A GATE ELECTRODE ON A PROTRUDING GROUP III-V MATERIAL LAYER AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE
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Application No.: US15210368Application Date: 2016-07-14
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Publication No.: US20160322488A1Publication Date: 2016-11-03
- Inventor: Young-jin CHO , Kyoung-yeon KIM , Sang-moon LEE , Ki-ha HONG , Eui-chul HWANG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR1020110119125 20111115
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/205 ; H01L29/66 ; H01L29/15

Abstract:
A semiconductor device including a group III-V barrier and a method of manufacturing the semiconductor device, the semiconductor device including: a substrate, insulation layers formed to be spaced apart on the substrate, a group III-V material layer for filling the space between the insulation layers and having a portion protruding higher than the insulation layers, a barrier layer for covering the side and upper surfaces of the protruding portion of the group III-V material layer and having a bandgap larger than that of the group III-V material layer, a gate insulation film for covering the surface of the barrier layer, a gate electrode formed on the gate insulation film, and source and drain electrodes formed apart from the gate electrode. The overall composition of the group III-V material layer is uniform. The barrier layer may include a group III-V material for forming a quantum well.
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Information query
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