发明申请
US20160336101A1 ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
审中-公开
电动执行机构电磁线圈，电磁致动器，曝光装置及装置制造方法
- 专利标题： ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- 专利标题（中）： 电动执行机构电磁线圈，电磁致动器，曝光装置及装置制造方法
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申请号： US14916725申请日： 2014-09-04
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公开(公告)号： US20160336101A1公开(公告)日： 2016-11-17
- 发明人: Akihiro ITO , Masayuki KOUKETSU , Shigeru MORIMOTO , Hiromitsu YOSHIMOTO , Koji TANAKA
- 申请人： CKD CORPORATION , NIKON CORPORATION
- 申请人地址： JP Komaki, Aichi JP Tokyo
- 专利权人： CKD CORPORATION,NIKON CORPORATION
- 当前专利权人： CKD CORPORATION,NIKON CORPORATION
- 当前专利权人地址： JP Komaki, Aichi JP Tokyo
- 优先权： JP2013-182925 20130904
- 国际申请： PCT/JP2014/073340 WO 20140904
- 主分类号： H01F5/06
- IPC分类号： H01F5/06 ; H02K41/03 ; H01F27/28 ; H01F7/08 ; H02K3/04
摘要：
Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.
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