发明申请
- 专利标题: DIE BONDING WITH LIQUID PHASE SOLDER
- 专利标题(中): DIY与液相焊接
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申请号: US14708375申请日: 2015-05-11
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公开(公告)号: US20160336292A1公开(公告)日: 2016-11-17
- 发明人: Dewen TIAN , Yiu Ming CHEUNG , Ming LI
- 申请人: ASM Technology Singapore Pte Ltd.
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A method of bonding a die comprising solder bumps to a substrate comprising bond pads, the method comprising the steps of heating the die from a first temperature to a second temperature, wherein the first temperature is below the melting point of the solder bumps, and the second temperature is above the melting point of the solder bumps; moving the die relative to the substrate to a first height, whereat the solder bumps contact the bond pads; moving the die further away from the substrate to a second height, while maintaining contact between the solder bumps and bond pads; and thereafter cooling the die from the second temperature to a third temperature to allow the solder bumps to solidify so as to bond the die to the substrate.
公开/授权文献
- US10014272B2 Die bonding with liquid phase solder 公开/授权日:2018-07-03
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