Invention Application
US20160336324A1 TUNNEL FIELD EFFECT TRANSISTOR AND METHOD OF MAKING THE SAME 审中-公开
隧道场效应晶体管及其制作方法

TUNNEL FIELD EFFECT TRANSISTOR AND METHOD OF MAKING THE SAME
Abstract:
A vertically integrated transistor device increases the effective active area of the device to improve the performance characteristics of the device. The transistor device may include a plurality of gate elements, a plurality of source-drain elements extending parallel to the plurality of gate elements and horizontally spaced therefrom; and a plurality of fin elements extending parallel to the plurality of gate elements and vertically spaced therefrom, wherein each of the plurality of fin elements is horizontally spaced a first distance from each of the other ones of the plurality of fin elements.
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