Invention Application
- Patent Title: GLASS SUBSTRATE MANUFACTURING METHOD
- Patent Title (中): 玻璃基板制造方法
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Application No.: US15162040Application Date: 2016-05-23
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Publication No.: US20160347643A1Publication Date: 2016-12-01
- Inventor: Hiroyuki YAMAUCHI , Go Takahashi , Motoshi Ono , Mamoru Isobe
- Applicant: Asahi Glass Company, Limited
- Applicant Address: JP Chiyoda-ku
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Chiyoda-ku
- Priority: JP2015-109277 20150529
- Main IPC: C03B33/09
- IPC: C03B33/09 ; H01L21/48 ; C03C15/00

Abstract:
There is provided a glass substrate manufacturing method for manufacturing a glass substrate with a plurality of through-holes. The method includes a laser processing of forming the plurality of through-holes in the glass substrate, the glass substrate having a first main surface and a second main surface facing the first main surface, by irradiating a laser beam toward the first main surface; and an etching process of injecting an etchant only from a position facing the second main surface of the glass substrate toward the plurality of through-holes formed in the glass substrate.
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