Invention Application
US20160349053A1 Micromachined Resonating Beam Gyroscopes 审中-公开
微加工共振光束陀螺仪

Micromachined Resonating Beam Gyroscopes
Abstract:
A single-axis resonating beam gyroscope uses a special arrangement of support tethers that maximizes the Q (quality factor) and minimizes stress sensitivity. The tethers are located at the nodal points of the beam with respect to a predetermined drive mode and are approximately one-fourth the length of the beam. Also, the tethers do not extend above or through the nodal points of the beam, which would be difficult to produce in typical MEMS fabrication processes. Embodiments typically use electrostatic drive and sense transduction. Trim electrodes may be used to compensate for any erroneous modal coupling.
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