发明申请
- 专利标题: CROSS-LINKABLE FLUORINATED PHOTOPOLYMER
- 专利标题(中): 交联荧光光刻胶
-
申请号: US15117032申请日: 2015-02-04
-
公开(公告)号: US20160349614A1公开(公告)日: 2016-12-01
- 发明人: Charles Warren WRIGHT , Douglas Robert ROBELLO , John Andrew DEFRANCO , Diane Carol FREEMAN , Frank Xavier BYRNE
- 申请人: ORTHOGONAL, INC.
- 国际申请: PCT/US2015/014425 WO 20150204
- 主分类号: G03F7/038
- IPC分类号: G03F7/038 ; G03F7/004
摘要:
A photosensitive composition is disclosed including a fluorinated photo cross-linkable polymer provided in a fluorinated solvent such as a hydrofluoroether. The photo cross-linkable polymer includes a first repeating unit having a fluorine-containing group but not a cinnamate group, and a second repeating unit having a fluorine-containing cinnamate group. The polymer has a total fluorine content in a range of 30 to 60% by weight. The composition can be used to form patterned barrier or dielectric structures over substrates and devices such as organic electronic devices.
公开/授权文献
- US09958778B2 Cross-linkable fluorinated photopolymer 公开/授权日:2018-05-01
信息查询
IPC分类: