Invention Application
- Patent Title: Stripe-Shaped Electrode Structure Including a Main Portion with a Field Electrode and an End Portion Terminating the Electrode Structure
- Patent Title (中): 带有电场的电极结构主要部分的条状电极结构和末端部分终止电极结构
-
Application No.: US15166957Application Date: 2016-05-27
-
Publication No.: US20160351668A1Publication Date: 2016-12-01
- Inventor: Werner Schwetlick , Robert Zink
- Applicant: Infineon Technologies AG
- Priority: DE102015108440.6 20150528
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/06 ; H01L29/10 ; H01L29/78
Abstract:
A semiconductor device includes a stripe-shaped electrode structure that extends from a first surface into a semiconductor portion. The electrode structure includes a main portion and an end portion terminating the electrode structure. The main portion includes a field electrode and a first portion of a field dielectric separating the field electrode from the semiconductor portion. The end portion includes a filled section in which a second portion of the field dielectric extends from a first side of the electrode structure to an opposite second side. The filled section is narrower than the main portion and a length of the filled section along a longitudinal axis of the electrode structure is at least 150% of a first layer thickness of the first portion of the field dielectric.
Public/Granted literature
Information query
IPC分类:
