Invention Application
US20160358751A1 ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME
审中-公开
ARC排放装置和包括其的等离子体处理系统
- Patent Title: ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME
- Patent Title (中): ARC排放装置和包括其的等离子体处理系统
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Application No.: US15080752Application Date: 2016-03-25
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Publication No.: US20160358751A1Publication Date: 2016-12-08
- Inventor: Jong-hyun LEE , Jung-woo SEO , Bo-kyung JUNG , Nam-hoon LEE , Gi-nam PARK , Sung-ho KANG , Tae-gon KIM , Jin-hwa HEO , Byung-joo OH , Gon-su KANG , Hyeok-jun KWON , Jin-seung LEE
- Applicant: Jong-hyun LEE , Jung-woo SEO , Bo-kyung JUNG , Nam-hoon LEE , Gi-nam PARK , Sung-ho KANG , Tae-gon KIM , Jin-hwa HEO , Byung-joo OH , Gon-su KANG , Hyeok-jun KWON , Jin-seung LEE
- Priority: KR10-2015-0078673 20150603; KR10-2015-0135555 20150924
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455 ; C23C16/458 ; C23C16/50

Abstract:
An arc discharge apparatus includes a body unit including a housing and a transmissive member fixed to the housing, the housing having a coolant inlet and a coolant outlet, and an electrode unit on the housing, the electrode unit including an anode and a cathode facing each other, wherein the anode includes a main body portion connected to the housing, an anode tip coupled to the main body portion, and a cooling line in the anode and in contact with an inner wall of the anode tip, the cooling line being connected to the coolant inlet and to the coolant outlet.
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