发明申请
US20160358751A1 ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME
审中-公开
ARC排放装置和包括其的等离子体处理系统
- 专利标题: ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME
- 专利标题(中): ARC排放装置和包括其的等离子体处理系统
-
申请号: US15080752申请日: 2016-03-25
-
公开(公告)号: US20160358751A1公开(公告)日: 2016-12-08
- 发明人: Jong-hyun LEE , Jung-woo SEO , Bo-kyung JUNG , Nam-hoon LEE , Gi-nam PARK , Sung-ho KANG , Tae-gon KIM , Jin-hwa HEO , Byung-joo OH , Gon-su KANG , Hyeok-jun KWON , Jin-seung LEE
- 申请人: Jong-hyun LEE , Jung-woo SEO , Bo-kyung JUNG , Nam-hoon LEE , Gi-nam PARK , Sung-ho KANG , Tae-gon KIM , Jin-hwa HEO , Byung-joo OH , Gon-su KANG , Hyeok-jun KWON , Jin-seung LEE
- 优先权: KR10-2015-0078673 20150603; KR10-2015-0135555 20150924
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; C23C16/455 ; C23C16/458 ; C23C16/50
摘要:
An arc discharge apparatus includes a body unit including a housing and a transmissive member fixed to the housing, the housing having a coolant inlet and a coolant outlet, and an electrode unit on the housing, the electrode unit including an anode and a cathode facing each other, wherein the anode includes a main body portion connected to the housing, an anode tip coupled to the main body portion, and a cooling line in the anode and in contact with an inner wall of the anode tip, the cooling line being connected to the coolant inlet and to the coolant outlet.
信息查询