Invention Application
- Patent Title: TABLE DEVICE AND CONVEYANCE DEVICE
- Patent Title (中): 表装置和输送装置
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Application No.: US14902369Application Date: 2013-12-18
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Publication No.: US20160369938A1Publication Date: 2016-12-22
- Inventor: Toshinori SATOU
- Applicant: NSK LTD.
- Applicant Address: JP Tokyo
- Assignee: NSK LTD.
- Current Assignee: NSK LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2013-138730 20130702
- International Application: PCT/JP2013/083977 WO 20131218
- Main IPC: F16M11/18
- IPC: F16M11/18 ; H01L21/677 ; F16M11/04

Abstract:
A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.
Public/Granted literature
- US09933108B2 Table device and conveyance device Public/Granted day:2018-04-03
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