Invention Application
US20160369938A1 TABLE DEVICE AND CONVEYANCE DEVICE 有权
表装置和输送装置

  • Patent Title: TABLE DEVICE AND CONVEYANCE DEVICE
  • Patent Title (中): 表装置和输送装置
  • Application No.: US14902369
    Application Date: 2013-12-18
  • Publication No.: US20160369938A1
    Publication Date: 2016-12-22
  • Inventor: Toshinori SATOU
  • Applicant: NSK LTD.
  • Applicant Address: JP Tokyo
  • Assignee: NSK LTD.
  • Current Assignee: NSK LTD.
  • Current Assignee Address: JP Tokyo
  • Priority: JP2013-138730 20130702
  • International Application: PCT/JP2013/083977 WO 20131218
  • Main IPC: F16M11/18
  • IPC: F16M11/18 H01L21/677 F16M11/04
TABLE DEVICE AND CONVEYANCE DEVICE
Abstract:
A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.
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