Invention Application
- Patent Title: MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME
- Patent Title (中): 单体蒸发装置及其控制方法
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Application No.: US15261629Application Date: 2016-09-09
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Publication No.: US20160376698A1Publication Date: 2016-12-29
- Inventor: Yong-Suk LEE , Myung-Soo HUH , Suk-Won JUNG , Jeong-Ho YI , Mi-Ra AN
- Applicant: Samsung Display Co., Ltd.
- Priority: KR10-2012-0141154 20121206
- Main IPC: C23C14/54
- IPC: C23C14/54

Abstract:
A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and vaporize a first monomer and a second monomer, respectively; a first flow pipe and a second flow pipe that are connected to the respective vaporizers and allow the first monomer and the second monomer, vaporized by the respective vaporizers, to flow therethrough; a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and a control valve apparatus that regulates monomer flow into the deposition chamber. The device facilitates smooth and uninterrupted application of monomer to the interior of a deposition chamber.
Public/Granted literature
- US10266941B2 Monomer vaporizing device and method of controlling the same Public/Granted day:2019-04-23
Information query
IPC分类: