发明申请
- 专利标题: SYSTEM FOR CREATING NANOSCALE PATTERNS
- 专利标题(中): 创建纳米图案的系统
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申请号: US15262800申请日: 2016-09-12
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公开(公告)号: US20160377987A1公开(公告)日: 2016-12-29
- 发明人: Franklin Mark Schellenberg , Keith Edward Bennett
- 申请人: Franklin Mark Schellenberg , Keith Edward Bennett
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
An super-resolution system for nano-patterning is disclosed, comprising an optical printing head that enables a super-resolution lithographic exposures compatible with conventional optical lithographic processes. The super-resolution exposures are carried out using light directed onto a medium using plasmonic structures, and in particular using plasmonic structures using specially designed super-resolution apertures, of which the “bow-tie” and “C-aperture” are examples. These specially designed apertures create small but bright images in the near-field transmission pattern. A printing head comprising an array of these apertures is held in close proximity to a medium for patterning. In some embodiments, a data processing system is provided to re-interpret the data to be patterned into a set of modulation signals used to drive the multiple individual channels and the multiple exposures.
公开/授权文献
- US09891536B2 System for creating nanoscale patterns 公开/授权日:2018-02-13
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