Invention Application
US20170009331A1 METHOD AND APPARATUS FOR FORMING COATING LAYER WITH NANO MULTI-LAYER
审中-公开
用纳米多层形成涂层的方法和装置
- Patent Title: METHOD AND APPARATUS FOR FORMING COATING LAYER WITH NANO MULTI-LAYER
- Patent Title (中): 用纳米多层形成涂层的方法和装置
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Application No.: US15174230Application Date: 2016-06-06
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Publication No.: US20170009331A1Publication Date: 2017-01-12
- Inventor: In Woong Lyo , Woong Pyo Hong , Kwang Hoon Choi , Hyuk Kang , Sang Jin Park , Yoon Suk Oh
- Applicant: Hyundai Motor Company , Hyundai Steel Company
- Priority: KR10-2011-0126658 20111130
- Main IPC: C23C14/02
- IPC: C23C14/02 ; C23C14/54 ; C23C14/14 ; C23C14/34 ; C23C14/50 ; C23C14/06 ; C23C14/32 ; C23F15/00

Abstract:
Disclosed is a method and apparatus for forming a coating layer using a physical vapor deposition apparatus equipped with a sputtering apparatus and an arc ion plating apparatus, comprising: a first coating step of forming a Mo coating layer on a base material using a the sputtering apparatus and a Mo target and Ar gas; a nitrating step of forming a nitride film forming condition using an arc ion plating apparatus and Ar gas and N2 gas; a second coating step of forming a nano composite coating layer of Cr—Mo—N using the Mo target and Ar gas of the sputtering apparatus and the Ar gas, N2 gas and a Cr source of the arc ion plating apparatus at the same time; and a multi-coating step of forming a multi-layer having alternating Cr—Mo—N nano composite coating layers and Mo coating layers by revolving the base material around a central pivot.
Public/Granted literature
- US10145001B2 Method and apparatus for forming coating layer with nano multi-layer Public/Granted day:2018-12-04
Information query
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