发明申请
US20170010544A1 COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
审中-公开
线圈组件，电磁致动器，阶段定位装置，平面装置和装置制造方法
- 专利标题： COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- 专利标题（中）： 线圈组件，电磁致动器，阶段定位装置，平面装置和装置制造方法
-
申请号： US15113428申请日： 2014-12-19
-
公开(公告)号： US20170010544A1公开(公告)日： 2017-01-12
- 发明人: Yang-Shan HUANG , Minkyu KIM , Gerard Johannes Pieter NIJSSE
- 申请人： ASML NETHERLANDS B.V. , ASML HOLDING NV
- 申请人地址： NL Veldhoven NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- 当前专利权人： ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- 当前专利权人地址： NL Veldhoven NL Veldhoven
- 国际申请： PCT/EP2014/078677 WO 20141219
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; H02K9/00 ; H02K3/48 ; H01F7/10
摘要：
A coil assembly for an electromagnetic actuator or motor, includes a magnetic core including at least one pair of slots; a coil, at least partly mounted inside the at least one pair of slots; and a cooling member, the cooling member being mounted to a surface of the coil.
信息查询
IPC分类:
