发明申请
- 专利标题： GRAPHENE LAYER TRANSFER
- 专利标题（中）： 石墨层转移
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申请号： US15228117申请日： 2016-08-04
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公开(公告)号： US20170011955A1公开(公告)日： 2017-01-12
- 发明人: Ageeth A. Bol , Steven E. Steen , James Vichiconti
- 申请人： International Business Machines Corporation
- 主分类号： H01L21/762
- IPC分类号： H01L21/762 ; H01L29/16 ; H01L29/786 ; H01L23/66 ; H01L29/66 ; H01L21/02 ; H01L29/06
摘要：
A method to transfer a layer of graphene from one substrate to another substrate is provided. The method includes providing a first layered structure including, from bottom to top, a copper foil, a layer of graphene, an adhesive layer and a carrier substrate. The copper foil is removed exposing a surface of the layer of graphene. Next, an oxide bonding enhancement dielectric layer is formed on the exposed surface of the layer of graphene. A second layered structure including a receiver substrate and a dielectric oxide layer is provided. Next, an exposed surface of the dielectric oxide layer is bonded to an exposed surface of the oxide bonding enhancement dielectric layer. The carrier substrate and the adhesive layer are removed exposing the layer of graphene.
公开/授权文献
- US09859379B2 Graphene layer transfer 公开/授权日：2018-01-02
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