Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US14844004Application Date: 2015-09-03
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Publication No.: US20170012000A1Publication Date: 2017-01-12
- Inventor: I-Ming Tseng , Wen-An Liang , Chen-Ming Huang
- Applicant: United Microelectronics Corp.
- Priority: CN201510388897.4 20150706
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L29/16 ; H01L29/06 ; H01L29/161 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor device and a method of fabricating the same, the semiconductor device including a fin structure, a first liner, a first insulating layer and a dummy gate structure. The fin structure is disposed on a substrate, where the fin structure has a trench. The first liner disposed in the trench. The first insulating layer disposed on the first liner. The dummy gate structure is disposed on the first insulating layer and disposed above the trench, where a bottom surface of the dummy gate and a top surface of the fin structure are on a same level.
Public/Granted literature
- US09653402B2 Semiconductor device and method for fabricating the same Public/Granted day:2017-05-16
Information query
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