Invention Application
- Patent Title: Passivation of Nonlinear Optical Crystals
- Patent Title (中): 非线性光学晶体的钝化
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Application No.: US15284231Application Date: 2016-10-03
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Publication No.: US20170025281A1Publication Date: 2017-01-26
- Inventor: Yung-Ho Chuang , Vladimir Dribinski
- Applicant: KLA-Tencor Corporation
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01S3/109 ; H01S3/02 ; H01L21/322 ; G01N21/88 ; G01N21/3563 ; G01N21/95 ; H01S3/094 ; H01S3/16
Abstract:
A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.
Public/Granted literature
- US10283366B2 Passivation of nonlinear optical crystals Public/Granted day:2019-05-07
Information query
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