Invention Application
US20170030741A1 MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE WITH ELECTRICAL COMPENSATION AND READOUT CIRCUIT THEREOF
审中-公开
具有电气补偿和读出电路的微电子机械系统装置
- Patent Title: MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE WITH ELECTRICAL COMPENSATION AND READOUT CIRCUIT THEREOF
- Patent Title (中): 具有电气补偿和读出电路的微电子机械系统装置
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Application No.: US15057912Application Date: 2016-03-01
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Publication No.: US20170030741A1Publication Date: 2017-02-02
- Inventor: Chiung-Wen Lin , Chiung-C. Lo , Chia-Yu Wu
- Applicant: Richtek Technology Corporation
- Priority: CN201510464597.X 20150731
- Main IPC: G01D5/241
- IPC: G01D5/241 ; G01D18/00
Abstract:
A MEMS device includes: a fixed structure, a movable structure, and a compensation circuit. The fixed structure includes a fixed electrode and a fixed compensation electrode. The movable structure includes a movable electrode and a movable compensation electrode. The movable electrode and the fixed electrode form a sensing capacitor, and the movable compensation electrode and the fixed compensation electrode form a compensation capacitor. The compensation circuit compensates a sensing signal generated by the sensing capacitor with a compensation signal generated by the compensation capacitor. The sensing capacitor and the compensation capacitor do not form a differential capacitor pair. A proportion of the sensing area of the compensation capacitor to the sensing area of the sensing capacitor is lower than 1.
Information query
IPC分类:
