Invention Application
US20170030744A1 DISPLACEMENT DETECTING DEVICE 审中-公开
位移检测装置

  • Patent Title: DISPLACEMENT DETECTING DEVICE
  • Patent Title (中): 位移检测装置
  • Application No.: US15220483
    Application Date: 2016-07-27
  • Publication No.: US20170030744A1
    Publication Date: 2017-02-02
  • Inventor: Akihide Kimura
  • Applicant: MITUTOYO CORPORATION
  • Priority: JP2015-148381 20150728
  • Main IPC: G01D5/26
  • IPC: G01D5/26
DISPLACEMENT DETECTING DEVICE
Abstract:
A displacement detecting device includes a scale diffraction grating and a detecting head unit. The detecting head unit includes a light source, a first retroreflecting unit that retroreflectes positive first-order diffracted light of light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, a second retroreflecting unit that retroreflectes negative first-order diffracted light of the light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, and a light receiving unit that receives an interference signal Each of the first retroreflecting unit and the second retroreflecting unit has a deflecting function of deflecting light incident on the corresponding retroreflecting unit by a predetermined angle and then emitting the light.
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