Invention Application
- Patent Title: Strained Group IV Channels
- Patent Title (中): 应变组IV通道
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Application No.: US15218922Application Date: 2016-07-25
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Publication No.: US20170033183A1Publication Date: 2017-02-02
- Inventor: Bernardette Kunert , Robert Langer , Geert Eneman
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP15179239.7 20150731
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/04 ; H01L29/161 ; H01L21/306 ; H01L21/02 ; H01L29/423 ; H01L21/324

Abstract:
Disclosed herein is a semiconductor structure including: (i) a monocrystalline substrate having a top surface, (ii) a non-crystalline structure overlying the monocrystalline substrate and including an opening having a width smaller than 10 microns and exposing part of the top surface of the monocrystalline substrate. The semiconductor structure also includes (iii) a buffer structure having a bottom surface abutting the part and a top surface having less than 108 threading dislocations per cm2, the buffer structure being made of a material having a first lattice constant. The semiconductor structure also includes (iv) one or more group IV monocrystalline structures abutting the buffer structure and that are made of a material having a second lattice constant, different from the first lattice constant.
Public/Granted literature
- US09876080B2 Strained group IV channels Public/Granted day:2018-01-23
Information query
IPC分类: