Embodiments of the present disclosure are directed towards an acousto-optics deflector and mirror for laser beam steering and associated techniques and configurations. In one embodiment, a laser system may include an acousto-optics module to deflect a laser beam in a first scanning direction of the laser beam on an integrated circuit (IC) substrate when the IC substrate is in a path of the laser beam and a mirror having at least one surface to receive the laser beam from the acousto -optics module, the mirror to move to control position of the laser beam in a second scanning direction, wherein the second scanning direction is substantially perpendicular to the first scanning direction. Other embodiments may be described and/or claimed.